Abstract

ABSTRACTThe paper proposes an approach for non-invasive measurement of displacement derivatives and defect identification using an optical interferometric technique based on diffraction phase microscopy. Our approach relies on the application of Wigner–Ville distribution method in diffraction phase microscopy for directly extracting the phase derivative information, which is subsequently utilized for non-destructive deformation metrology. In addition, the proposed method offers good computational efficiency and robustness against noise for fast defect inspection. The performance of the proposed method is validated by experimental results.

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