Wide-field heterodyne interferometric vibrometry for two-dimensional surface vibration measurement

Abstract

Conventional laser Doppler vibrometry and heterodyne interferometry suffer during the simultaneous measurement of the spatial distribution of vibration parameters such as the amplitude, frequency and phase in a wide field of view. Although demand is increasing for methods that can measure vibrations over a wide field of view for a wide range of applications from industrial product inspections to biological measurements, full-field (FF) techniques for high-speed vibration measurements without a spatial scan are untapped. We propose a new method for high-speed FF vibration measurement that can easily be combined with profilometry and tomographic interferometry using a conventional CCD or CMOS camera. In principle, the measurable vibration frequency is unrestricted because the heterodyne signal produced by the modulated interferogram can be controlled to accommodate the CCD frame rate. The validity of the proposed method and the measurement accuracy of the spatial vibration amplitude were evaluated through simulations and experiments. In experiments, the spatial vibration parameters of a mirror vibrated at a frequency of 1kHz and amplitude of approximately 5–65nm were successfully measured with a spatial fluctuation of 3%–6.5%.