Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source.

Peter D Baksh,Jeremy G Frey,William S Brocklesby,Michal Odstrčil,Hyun-Su Kim,Stuart A Boden

doi:10.1364/ol.41.001317

Abstract

High-harmonic generation (HHG) provides a laboratory-scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and x-ray spectral region. Here we demonstrate transmission extreme ultraviolet (EUV) ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm and fields of view up to ∼100 μm are demonstrated. These results demonstrate the potential for wide-field, high-resolution, laboratory-scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.

Highlights

Coherent Diffraction Imaging (CDI) is a rapidly-evolving technique attractive for imaging at wavelengths where conventional lenses become ineffective [1, 2]
High harmonic generation (HHG) provides a laboratory scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the extreme ultraviolet (EUV) and X-ray spectral region
Image resolution is diffraction-limited at 54 nm, and fields of view up to ∼100 μm are demonstrated. These results demonstrate the potential for wide-field, high resolution laboratory scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection

Summary

Introduction

Coherent Diffraction Imaging (CDI) is a rapidly-evolving technique attractive for imaging at wavelengths where conventional lenses become ineffective [1, 2]. High harmonic generation (HHG) provides a laboratory scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and X-ray spectral region.

Results

Conclusion