Abstract

A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15° Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2∼30%), providing wide bandwidth and wide tuning range. The 3dB bandwidth was tuned from 146MHz to 130MHz by applying 15V to one of the MEMS variable capacitors.

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