Abstract
As an essential functional block in radio frequency (RF) front-ends, surface acoustic wave (SAW) filters with large fractional bandwidth (FBW), high center frequency ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$f_{c}$ </tex-math></inline-formula> ), and low loss are highly sought-after in 5G new radio (NR). To address this end, 32°Y-X LiNbO3/SiO2/Si heterostructure with high electromechanical coupling coefficient of 23% was constructed, while the propagation characteristics as well as spurious resonance were analyzed through finite element method (FEM) and one-port resonators measurement. It is revealed that by using thin electrodes in the series resonator and thick electrodes in the parallel resonator, spurious modes are successfully eliminated out of the passband. As a result, the SAW filters formed by the above resonators are capable of several superb RF performances: a large bandwidth of 730 MHz (FBW of 19.5%) at <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$f_{c}$ </tex-math></inline-formula> of 3.74 GHz, a small insertion loss (IL) of 3.03 dB, and a flat passband. Furthermore, since our devices were fabricated by standard photolithography process, this work advances commercial implementation of SAW filter in 5G NR.
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