Wideband RF MEMS switch using two dimensional actuations

Abstract

In this paper, a new wideband RF MEMS switch using lateral and vertical actuations has been proposed which can be used for wide frequency band. The switch consists of one side clamped bridge and two electrostatic actuators array which move the bridge laterally. There is also one vertical electrostatic actuator which moves the bridge up and down. This actuation voltage is equal to 15 V. A flexible hinge is used in the proposed structure, which has a little spring constant in the lateral direction. Thus, by applying a small voltage, the switch bridge can be moved laterally to left or right and it changes the capacitive area between the bridge and RF signal line both in up and down positions. Depending on left or right electrostatic actuation forces, the bridge moves to left or right and the switch capacitive area is increased or decreased. The lateral actuation voltage of the proposed switch is equal to 2 V. Briefly, the switch can operate in wider bandwidth than conventional structure which consists of only vertical actuator. The simulations are done by HFSS and COMSOL softwares. The bandwidth of this switch is from 4.5 to 10 GHz.