Abstract
This paper presents design parameters of mass analysis magnets used for achieving second-order double focusing in ion implanters fitted with a wide beam ion source. A sector magnet with curved pole faces has been considered in the present computations. The results of our study have highlighted the significance of the parameters φ, magnet deflection angle, α and β, the beam entrance and exit angles, R, radius of the ion trajectory, and S, the slit width of the ion source, in the design of these magnet systems.
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