Abstract
ABSTRACTPiezoelectric Microelectromechanical Systems (MEMS) has been proven to be an attractive technology for harvesting small energy from the ambient vibration. Recent advancements in piezoelectric materials and harvester structural design, individually or in combination, have improved MEMS energy harvesters to achieve high enough power density, compactness and ultra wide bandwidth, bringing us closer towards battery-less autonomous sensors systems and networks in near future. Among the breakthroughs, non-linear resonating beam for wide bandwidth resonance is the key development to enable robust operation of MEMS energy harvesters over the unpredictable and uncontrollable frequency spectra of ambient vibration. We expect that a coin size harvester will be able to harvest about 100μW continuous power at below 100 Hz and less than 0.5 g input vibration and at reasonable cost.
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