Abstract
This paper presents the design, fabrication and characterization of a millimetre-wave wide-band patch antenna integrated on silicon (Si) and using a BCB membrane suspended over a deep cavity etched in the Si substrate. The antenna structure consists of a top patch on a Si cap, a bottom patch on a BCB membrane and a ground plane in the cavity. The antenna takes advantage of the coupling between the stacked patches and the large air cavities to achieve a wide impedance bandwidth around 60 GHz. The bottom patch is implemented using electroplating on the suspended BCB membrane which is transferred through our wafer-level transfer technique over the cavity. The size of the realized antenna is 3.5 × 2.8 × 0.6 mm3. The fabricated antenna showed a reflection coefficient lower than ?7 dB from 49.5 GHz to more than 67 GHz (30 % fractional bandwidth) and an experimental gain in the order of 7 dBi at 60 GHz in good agreement with the simulation (7.5 dBi).
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