Abstract

In recent years, the demand for high purity spinning processes has been growing in certain industry branches, such as the semiconductor, biotechnological, pharmaceutical, and chemical industry. Therefore, the cleanness specifications have been tightened, and hermetically sealed process chambers are preferred. This paper presents an advantageous solution for such an application featuring a large scale, wide air gap, and a high accelerating bearingless segment motor. Bearingless slice motors allow complete magnetic levitation in combination with a very compact and economic design. The disc-shaped rotor holds permanent magnets generating magnetic flux in the air gap. Hence, three degrees of freedom are passively stabilized by reluctance forces. Thus, only the radial rotor position and the rotor angle have to be controlled actively. The announced bearingless segment motor is a subtype of the bearingless slice motor, featuring separate independent stator elements. This leads to a reduction of stator iron, cost, and weight and, in addition, leaves space for sensors and electronics enabling a very compact system design.

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