Abstract
White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.
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