White light diffraction phase microscopy as profilometry tool

Abstract

A reflection type white light diffraction phase microscope for full field surface profiling of opaque samples is proposed. The system can extract surface profile from one recorded interferogram without any mechanical movement and the use of white light makes it free from speckle noise. We validated the performance of our system by measuring a known step sample and a high-quality plane sample. The step height of the step sample is found to be 88.5 nm with a standard deviation of 1.4 nm, and the surface peak to valley value of the plane sample is found to be 28.6 nm with a standard deviation of 3 nm.