Abstract
We develop a hydrofluoric (HF) etching process to open a microhole on the hollow glass microsphere (HGM). The typical whispering gallery mode (WGM) resonance was observed by coupling the HGM with a tapered fiber. Dioctyl phthalate was filled into the HGM, and the resonance wavelength decreased at elevated temperatures. We analyzed the WGM resonance properties inside the liquid-filled HGM with a higher or lower refractive index in comparison to the HGM wall. Four different liquids were also injected into the HGM to investigate the influence of the thermo-optic coefficient on the temperature sensitivity. Size-dependent experiments further showed that HGMs with varying sizes have varying temperature sensitivity. The maximum temperature sensitivity observed was 334.3 pm/°C.
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