Abstract
In this paper, an analysis of reflection high-energy electron diffraction (RHEED) performed on polycrystalline films is presented. It is shown that it is possible to obtain qualitative and quantitative information about the crystallography of the deposit. Two series of test samples were used: (i) glass substrates recovered by Fe grains with a (200) fiber-like texture normal or inclined with respect to the surface normal, and (ii) the same films but with a (110) texture. These samples exhibit characteristic RHEED patterns. Using a simple model, it is possible to determine: (i) the texture of the film, (ii) the average angle of the texture axis with respect to the surface normal, and (iii) the angular width of the distribution of this angle about its average value.
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