Abstract

The etching of glasses in aqueous hydrofluoric acid (HF) solutions is applied in many technological fields. Particularly, the textured transparent conductive oxide materials on the glass substrate etched byHFwere used to improve the current density of solar cells. In this study, the textured glass substrate has been etched by solution and the Al‐dopedZnO(AZO) thin films have been prepared on this textured glass substrates byRFmagnetron sputtering method. After theAZOfilm deposition, the surface ofAZOhas been etched by hydrochloric acid with different concentration and etching time. EtchedAZOthin films had higher haze ratio and sheet resistance than bareAZOglass. Increases in the root‐mean‐square surface roughness ofAZOfilms enhanced from 53.78 to 84.46 nm the haze ratio in above 700 nm wavelength. Our process could be applicable in texturing glass and etchingAZOsurface to fabricate solar cell in industrial scale. We also carried out fabricating an organic solar‐cell device. Energy conversion efficiency improvement of 123% was obtained with texturedAZO‐based solar‐cell device compared with that of nontextured solar‐cell device.

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