Abstract
Perovskite BaTiO 3 nanoparticles were synthesized by the RF-plasma chemical vapor deposition method using Ba(DPM) 2 and Ti(OiPr) 4 as source materials. The suitable Ba/Ti molar ratio of reactants for preparing a single phase of BaTiO 3 with a stoichiometric composition was experimentally confirmed to be about 1.2±0.1. The average particle size of BaTiO 3 nanoparticles was measured to be 15.4 nm by transmission electron microscopy (TEM) images, which was nearly equivalent to the crystalline size (12.2 nm) calculated from X-ray diffraction (XRD) measurements using Hall's equation. Therefore, most of the BaTiO 3 nanoparticles were single crystals. Most BaTiO 3 nanoparticles were confirmed to be well-crystallized single crystals with a clear lattice image obtained by high-resolution TEM.
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