Abstract

AbstractAmorphous B-N-C films with a variety of properties were deposited by PVD-magnetronsputter-ion-plating. Compared to nonconductive reactive r.f. BN-targets the semiconductive behaviour of specially produced B4C-targets permitted a d.c. reactive or non-reactive mode of deposition. These films are characterized by high hardness with decreased coefficient of friction. A tribological evaluation by modified pin-on-disk outline the wear protection effects in tribosystems with metal counter part. This work was partially financed by the Commission of the European Community under Brite/EuRam contract BRE2-CT93-0451.

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