Wear-corrosion properties of diamond conditioners in CMP slurry

Abstract

There are three types of conditioners discussed, they were manufactured as follows: (a) bonded by electroplating nickel (ED); (b) brazing Ni–Cr alloy (BD); and (c) diamond-like carbon (DLC) film deposition on a brazed conditioner (BDD). After a wear-corrosion test, the brazing process shows no diamond fall-out when compared with the electroplating process. The denser distribution of diamond grits causes a lower coefficient of friction and a lower weight loss of counterpart, and this in turn causes the ring rotating but less ploughing action during the wear-corrosion test. A good clearance between each diamond grits benefits the penetration against counterpart, and indeed scrapes (i.e. conditions) more efficiently. DLC film deposited on the conditioner surface of brazed Ni–Cr alloy conditioner BDD exhibits the best overall performance in terms of a higher removal rate, a lower wear loss and a better corrosion resistance when compared with conditioners ED and BD.