Abstract

We introduce a simple method to determine the in-plane birefringence of transparent flexible films by using transmission spectroscopic ellipsometry. The pseudo-ellipsometric constants which can represent their sample azimuthal angle dependent characteristics are introduced. The effect of in-plane birefringence and sample azimuthal angle on the pseudo ellipsometric constants is calculated using Jones matrix formalism, and the observed sample azimuthal angle dependence of measured pseudo-ellipsometric data is well understood. Wavelength dependence of in-plane birefringence is expressed in terms of the Sellmeier dispersion equation. The best fit pseudo-ellipsometric spectra to the measured ones at the sample azimuthal angles of every 15° from 0 to 90° are searched. The dispersion coefficients of the Sellmeier equation and the azimuthal angle of the optic axis are determined for polycarbonate (PC), poly(ethylene naphthalate) (PEN), poly(ethylene terephthalate) (PET), polyimide (PI), and colorless polyimide (CPI) films.

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