Wavelength Dependence of Femtosecond Pulsed Laser Deposition of Zinc Oxide Films

Abstract

We used 130-fs, 790-nm and frequency-doubled 395-nm laser pulses to study the wavelength dependence of femtosecond pulsed laser deposition of Al-doped ZnO films. The short wavelength pulses helped to increase deposition rates, decrease electrical resistivity of the films, and reduce droplets mixed into deposits. The transmission property of the films in the visible range was unchanged by the frequency doubling. The optical emission study showed a reduction of ion emissions and increase of kinetic energy when the 395-nm pulses were used.