Abstract
This paper presents a new Raman tool for local investigations of very thin waveguiding films. This method, called waveguide Raman microspectroscopy (WRMS), combines the advantages of micro-Raman spectroscopy (MRS) and waveguide Raman spectroscopy (WRS). Experiments were carried out on a thin TiO2 waveguide (150 nm thick) obtained by the sol–gel process. Results obtained on the TiO2 thin waveguide confirm the interest in this non-destructive method, including simultaneous optical observations of the layer, local investigations, microstructural analyses and very low-wavenumber Raman scattering investigations. Further applications of WRMS are described. © 1997 John Wiley & Sons, Ltd.
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