Abstract
Evanescently coupled, waveguide integrated photodiodes were fabricated on InP. The device design is intended to provide ultrafast photoresponse together with a high responsivity. A 3 dB bandwidth of 45 GHz and 90% internal quantum efficiency is achieved at 1.55 /spl mu/m wavelength. High-speed operation with linear power response is obtained at power levels as high as 5 mW.
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