Wavefront phase reconstruction approach of imaging interferometry based on shearography and the integrated unwrapping algorithm

Abstract

Imaging interferometry is a method used for high-precision inspection. It has a widespread application value in the semiconductor film detection and interferometric synthetic aperture radar. During the imaging interferometry process, the interferometric phase image, as the result of imaging process, can be low-quality because of under-sampling effect, mixed noise, etc. Thus, research groups around the world focus on optimal unwrapping methods as a way to reduce the harmful effect caused by under-sampling effect and mixed noise. By just one interferometric phase image, the result for this wavefront reconstruction method can be obtained. We present a optimal process based on shearography and the integrated unwrapping algorithm with a better accuracy parameter for the unwrapping phase formula. By just one interferometric phase image, the result for this wavefront reconstruction method can be obtained. At last, by verifying the simulation results and experiment data from different perspectives, the ability to improve data accuracy is described.