Abstract
A new scheme for wavefront correction in the extreme ultraviolet wavelength range is presented. The central feature of the scheme is the successful growth of crystalline piezoelectric thin films with the desired orientation on an amorphous glass substrate. The piezoelectric films show a high piezoelectric coefficient of 250 pm/V. Using wavefront calculations we show that the grown films would enable high-quality wavefront correction, based on a stroke of 25 nm, with voltages that are well below the electrical breakdown limit of the piezoelectric film.
Highlights
Reflective multilayer mirrors (MLM) are key optical components for the extreme ultraviolet (EUV) wavelength range [1,2]
The main breakthrough we report here is that we obtain a stroke of 25 nm, which is well above the desired quarter-wavelength stroke of 3.4 nm by achieving, growth of crystalline piezoelectric films with desired (100)-orientation on amorphous glass substrates [30]
We have demonstrated the basic feasibility of a novel approach for wavefront correction in the EUV wavelength range based on crystalline piezoelectric thin films grown on amorphous glass substrates
Summary
Reflective multilayer mirrors (MLM) are key optical components for the extreme ultraviolet (EUV) wavelength range [1,2]. The residual expansion of thick Fused Silica glass substrates, driven by structured back-illumination with a heating light beam, has been utilized for wavefront correction [7] This method preserves the mechanical substrate stability but actuation becomes slow, about 0.1 nm/min [7], and the transverse resolution of actuation at the mirror surface is limited to several centimeters by heat conduction. The unique manner of achieving such large stroke is based on a crystalline piezoelectric film, lead zirconium titanate PbZrxTi1-xO3 (PZT) at an x = 0.52 composition, is deposited onto an amorphous glass substrate [30] This choice of an amorphous glass substrate was made to show that our approach is compatible with the substrates normally used for EUV wavelengths that need to be made from amorphous glass. We present measurements at single pixels to determine the absolute piezoelectric response and show that our approach fulfills the quantitative requirements for wavefront correction in the EUV wavelengths
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