Waterproof, flexible field-effect transistors with submicron monocrystalline Si nanomembrane derived encapsulation for continuous pH sensing

Abstract

To understand the physio-pathological state of patients suffering from chronic diseases, scientists and clinicians need sensors to track chemical signals in real-time. However, the lack of stable, safe, and scalable biochemical sensing platforms capable of continuous operation in liquid environments imposes significant challenges in the timely diagnosis, intervention, and treatment of chronic conditions. This work reports a novel strategy for fabricating waterproof and flexible biochemical sensors with active electronic components, which feature a submicron encapsulation layer derived from monocrystalline Si nanomembranes with a high structural integrity due to the high formation temperature (>1000 °C). The ultrathin, yet dense and low-defect encapsulation enables continuous operation of field-effect transistors in biofluids for chemical sensing. The excellent stability in liquid environment and pH sensing performance of such transistors suggest their great potential as the foundation of waterproof and scalable biochemical sensors with active functionalities in the future. The understandings, knowledge base, and demonstrations for pH sensing reported here set the stage for the next generation long-term biosensing with a broad applicability in biomedical research, food science, and advanced healthcare.