Abstract
AbstractMany styrylpyridinium compounds (SPC), which are very stable in the dark, were prepared and evaluated as photobleachable dyes for contrast enhanced lithography (CEL). The photobleaching characteristics of water‐soluble contrast enhancing materials composed of SPC and water‐soluble polymer depend on the structure of the SPC and the kind of polymers used. The technique using SPC‐based CEL proved to be very effective for the resist pattern profiles.
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