Abstract

Water jet guided laser micro-machining is a novel processing technique that utilizes the synergistic effect of high-pressure water jets and lasers. To qualitatively and quantitatively investigate and evaluate the sensitivity of ablation depth, material removal rate, taper angle, surface morphology, and elemental composition to processing parameters, multiple characterization techniques, including scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), and industrial computed tomography (CT), was undertaken. The experimental results show a high sensitivity of the ablation depth, volume material removal rate, and surface morphologyprocess parameters. At the same time, the taper angle is more sensitive to the laser power. Furthermore, a maximum aspect ratio was achieved under certain conditions, reaching up to 7.5. In practical machining, suitable laser processing parameters are selected based on different expected objectives (processing efficiency and quality). This experimental study can provide valuable guidance for the high-quality water-guided laser micro-machining of ceramic matrix composites (CMCs).

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