Abstract

Structured conducting thin layers of poly(3,4-ethylenedioxythiophene) (PEDOT) have been made by photosensitizing a PEDOT latex which is stabilized with polystyrene sulphonic acid (PSS). The process is based on waterborne solutions only and makes use of negatively acting, highly sensitive, lithography with UV light of 365 nm (I-line). The minimum feature size obtained is 1 μm spacings and 2.5 μm lines with a sheet resistance of about 1 kOhm/square. The environmentally acceptable technology has been demonstrated with functional all-polymer integrated circuits prepared on 150-mm wafers.

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