Abstract
Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5 dB/mm is also confirmed by measuring transmission through long waveguides.
Highlights
Nanophotonic devices are receiving continued attraction because of the possibility to integrate large-scale, monolithic photonic circuits with electronic circuits [1]
We show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits
We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities
Summary
Nanophotonic devices are receiving continued attraction because of the possibility to integrate large-scale, monolithic photonic circuits with electronic circuits [1]. By employing silicon as photonic base material established fabrication routines originally developed for the realization of electronic integrated circuits can be directly used to create high-quality photonic structures. After thinning of the remaining diamond layer to a thickness of a few hundred nanometers (as required for the realization of nanophotonic waveguides) the analogous substrate to SOI, namely diamond-on-insulator (DOI), is obtained [14]. This approach inherently limits the size of the optical circuits that can be realized because of the restricted dimensions of diamond single crystals and requires sophisticated substrate processing techniques that reduce the device yield. Best quality factors of 11,000 in weakly coupled devices illustrate the potential of DOI as a convenient template for optical circuits and sensing applications
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