Abstract
Wafer-scale arrays of well-orderedPb(Zr0.2Ti0.8)O3 nanodiscs and nanorings were fabricated on the entire area(10 mm × 10 mm) ofthe SrRuO3 bottomelectrode on an SrTiO3 single-crystal substrate using the laser interference lithography (LIL) process combinedwith pulsed laser deposition. The shape and size of the nanostructures were controlled bythe amount of PZT deposited through the patterned holes and the temperature of thepost-crystallization steps. X-ray diffraction and transmission electron microscopyconfirmed that (001)-oriented PZT nanostructures were grown epitaxially on theSrRuO3(001) bottom electrode layer covering the (001)-oriented single-crystal substrate. Thedomain structures of PZT nano-islands were characterized by reciprocal spacemapping using synchrotron x-ray radiation. Ferroelectric properties of each PZTnanostructure were characterized by scanning force microscopy in the piezoresponsemode.
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