Wafer-level ordered arrays of aligned carbon nanotubes with controlled size and spacing onsilicon

Abstract

Aligned carbon nanotubes with uniform outer diameters, ordered over wafer-scale areaswere fabricated using porous alumina templates on silicon. Anodization of aluminium filmsdeposited on corrugated silicon surfaces, patterned using interference lithography, led toperiodic pore structures over wafer-scale areas with controlled spacing and symmetry, andwith pore sizes independently controlled through the anodization conditions.Nickel deposited at the base of the pores catalysed CNT growth during PECVD.These results demonstrate a wafer-scale approach to the control of the size, pitch,ordering symmetry, and position of nanotubes and nanowires in a rigid insulatingscaffold.