Abstract

The setup in the UHV box coater for the HADES RICH mirrors was modified to deposit VUV reflective layers on large area substrates. These substrates were made of 2 mm thick float glass with 87 cm spherical curvature and a perimeter of 86 cm. A good uniformity of the coatings could be obtained by a larger source-to-substrate distance of 155 cm. Impurity problems due to lower deposition rates had to be avoided with a better process vacuum. The modified setup, the thickness calibrations, uniformity tests, process conditions and reflectivity measurements are presented.

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