Abstract
The peculiarities for formation of the image of volumetric asymmetric absolutely absorbing edge (the main fragment of constant thickness thick plates) in a diffraction-limited projection system are investigated in analytical form applied to 3D-objects dimensional inspection. Structures and profiles of image intensities for front and back object sides are studied respectively at small and big apertures of the 3D-object optical system for various ratios of object bevel c , the Fresnel zone size d ~ ( l - the light wavelength, d - object thickness) and an angular aperture of the optical system. It is shown that in case when the bevel с << d , the shift of intensity profile of the 3D-edge image, proportional to Fresnel's zone and bevel size, takes place. Formulas for the image profile of the back side are obtained and investigated in case of strong volumetric effects, when the focus-row depth of the system is much less than the object thickness. The obtained results are in good agreement with results of computer simulations.
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