Abstract
Vapor phase infiltration is a facile process that adds metallic features to organic polymer patterns. Generally, volume expansion in typical polymers such as poly(methyl methacrylate) (PMMA) is observed after metal infiltration, which limits the application of this technique in nanofabrication processes. In this study, poly(sec-butyl methacrylate) P(sBuMA) and poly(iso-butyl methacrylate) P(iBuMA) with leaving groups were selected as alternatives for PMMA and poly(tert-butyl methacrylate) P(tBuMA), and their aluminum (Al) infiltration behaviors were investigated. Notably, Al species infiltrated into P(sBuMA) and P(iBuMA) at 200 °C, whereas no Al infiltration was observed at 100 °C. Volume shrinkage was observed for both polymers after infiltration. This shows that the volume change in the base material after metal infiltration can be minimized by combining a conventional volume-expanding polymer, such as PMMA, with volume-shrinking polymers with high process temperature durability.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
