Abstract
Thick film semiconductor gas sensors based on aluminum-doped zinc oxide (AZO) with nanoparticle size were fabricated to detect volatile organic compound (VOC) existed in building, especially, formaldehyde (HCHO) gas which was known as the cause of sick building syndrome. The sensing materials for screen printing were prepared using roll milling process with binder. The crystallite sizes of prepared materials were about 15 nm through X-ray diffraction (XRD) analysis and scanning electron microscopy (SEM). Gas response characteristics were examined for formaldehyde (HCHO), benzene, carbon monoxide, carbon dioxide gas existing in building. In particular, the sensors showed responses to HCHO gas at sub ppm as a function of operating temperatures and gas concentrations. Also, we investigated sensitivity, repeativity, selectivity, and response time of sensor. The transients were very sharp, taking less than 2 s for 90% response. The sensor has shown very stable response at 350 degrees C and followed a very good behavior and showed 60% response in 50 ppb HCHO concentration at 350 degrees C operating temperatures.
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