Abstract
We report an analysis of void nucleation as a relaxation mechanism in freestanding biaxially strained ultrathin films of face-centered cubic metals based on large-scale molecular-dynamics simulations. Above a critical strain level, multiple threading dislocations are emitted from the film surface. The surface step traces formed by gliding dislocations on intersecting and on adjacent parallel glide planes lead to formation and growth of surface pits and grooves, while vacancies form due to gliding of jogged dislocations and dislocation intersections. Coalescence of the surface pits with vacancy clusters is the precursor to the formation of a larger void extending across the film.
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