Abstract

Electronic nose (e-nose) is a useful tool for gas detection in environment monitoring, food industry and medical diagnosing. It utilizes sensor arrays to generate recognition pattern in identifying odor or specific analyte. Here a novel multimode e-nose is demonstrated for the detection of volatile organic compounds (VOCs) by integrating both gravimetric-sensitive sensor and electric-sensitive sensor. In this system, film bulk acoustic resonator (FBAR) is used to gain mass related information and silicon nanowire field effect transistor (Si-NW FET) to collect electrical related information for the analytes. The electronic nose is applied to discriminate the ethanol-hexane mixture and the concentration of each gas can be successfully calculated by simple math without using complex mathematic model. The hybrid e-nose system shows potential for the analysis of VOC mixture in the future.

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