Abstract
Vapor–liquid–solid growth of needle-like silicon nanocones via atmospheric pressure chemical vapor deposition from SiCl 4 and using Ga and Al catalysts is reported. Scanning electron microscopy and transmission electron microscopy reveal that the nanocones are composed of an oxide shell with a Si core. Energy dispersive spectroscopy along the length of the nanocones indicates that the catalyst is gradually consumed during the growth process, resulting in the needle-like morphology. Growth of the Si nanocones may occur via H 2 reduction of SiCl 4 at 950 °C, during which HCl(g) is generated as the reaction by-product. In this growth mechanism, the gradual etching of the Al/Ga catalyst by HCl leads to a gradual decrease of the catalyst volume, and hence the tapered Si nanowire morphology.
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