Abstract
In recent years, micro manufacturing with femtosecond lasers has received considerable attention as an efficient technique for producing three-dimensional devices, combining multiple functionalities in a single monolithic substrate. In this manufacturing process, stress-anisotropy resulting from non-ablative laser exposure can have both positive and negative effects on the process out-come. In this work, we present a simple method for visualizing stress anisotropy, combining highly symmetric laser-written patterns with polarization microscopy, as a tool for identifying the various anisotropic contributions to the laser fabrication process.
Highlights
Femtosecond laser machining has enabled the manufacture of a wide variety of integrated, threedimensional, multi-functional devices all on a single substrate [1,2,3,4,5,6,7,8,9,10,11,12]
We can correlate the formation of these nanogratings with the occurrence of laser-induced stress anisotropy
Rotating the writing polarization while fabricating successive stressors should reveal a change in the orientation of the induced stress anisotropy
Summary
Femtosecond laser machining has enabled the manufacture of a wide variety of integrated, threedimensional, multi-functional devices all on a single substrate [1,2,3,4,5,6,7,8,9,10,11,12]. While the benefits of this technology are many, there are still significant technological obstacles that must be overcome to reliably and predictably produce these devices One of these hurdles is that of anisotropy in the writing process. This anisotropy results from various sources: inhomogeneity in the laser beam [13], pulse front tilt [14], material anisotropy [15], and the formation of selforganized nanostructure [16,17]. Often these effects are manifested as a residual stress. In silica glass [18,19] stress arises form re-arrangement of the material lattice, which is accompanied by a volume change [20,21,22,23]
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
