Visualization and Analysis of Temporal and Steady-State Gas Concentration in Process Chamber Using 70-dB SNR 1000 fps Absorption Imaging System

Abstract

We are developing a 70-dB SNR 1,000 frame-per-second absorption imaging system, and it enables us to visualize gas concentration distribution in a vacuum chamber for semiconductor manufacturing. This article presents the measurement and analysis of temporal and steady-state NO2 gas concentration distribution using this system. In the steady-state gas flow condition which supplied from a shower plate, the spectrometry of NO2 gas shows a good linear relationship between the absorbance and the partial pressure with the system. The system enables the visualization of steady-state of NO2 gas concentration distribution which supplied from one hole of shower plate, and the results are compared with simulation to discuss the reasonability of the measurement. The system also enables to visualize the temporal NO2 gas concentration distribution supplied from a single nozzle, and the advantages of the system’s features of 70-dB and 1,000 fps are discussed.