Abstract
The cathodic deposition of WO3 film by pulsed mode makes for decrease in the size of nanoclusters in the structure of the film and facilitates the shift of its coloration maximum from the IR region of the optical spectrum to the visible region on reduction. This made it possible to increase the sensitivity of optical hydrogen sensor with such a film and a thin layer of catalyst (Pt or Pd) to 1-2 vol % H2. It has been shown that using a thicker fine-grained catalyst layer in visual sensor with planar SnO2 — WO3 — Sb2O5 — Pd structure, one can reduce the sensor coloration time from 3 minutes to 1–3 seconds.
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