Abstract
We report the fabrication of a planar waveguide structure in a highly nonlinear glass substrate, germanium gallium indium sulfide glass, via dual-energy C ion implantation at room temperature. The guiding modes of the planar waveguide were measured by the prism-coupling method at wavelengths of 633nm and 1539nm. The profiles of the change in refractive index were reconstructed based on the results of prism coupling. The near-field intensity distributions of the glass waveguide modes in the visible (633nm) and near-infrared bands (1300nm, 1539nm and 1630nm) were obtained by the end-face coupling method. The implanted cross section was observed and an accurate measurement of the planar waveguide region was performed using a metallographic microscope with transmitted polarized light.
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