Abstract
A surface acoustic wave (SAW) sensor for sensing viscosity is presented. SAW devices are commonly used in electronic signal processing. SAW delay lines offer many attractive features for applications as vapor and liquid sensors. In this paper, a SAW viscosity sensor utilizing the shear horizontal displacement of a leaky SAW mode is presented. The sensor is based on a dual SAW delay line oscillator. The leaky SAW with the shear horizontal displacement is excited on a 36°‐rotated Y‐cut X‐propagation LiTaO4 substrate using interdigital transducers. The sensitivity of the SAW oscillator frequency to the viscosity of liquids has been measured. It is shown that the viscosity sensor has a sensitivity of about 100 Hz/cP at an operating frequency of 35 MHz with a threshold sensitivity of about 2 cP. Test results to include response time, hysteresis, linearity, and temperature effects will also be presented.
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