Abstract
In order to solve the traditional problems such as long designing cycle and high designing cost, the research applies the virtual simulation technology to the design of cathode target on magnetron sputtering vacuum coater. Through analyzing, modeling and simulating, the process model of a typical cathode target on magnetron sputtering coater is proposed. The virtual design of cathode target framework based on distributed collaborative simulation is constructed, which provides a theorial basis for the research of virtual design on cathode target.Using Solidworks software, parts modeling and assembly modeling of cathode target are realized. Using ADAMS, the movements of charged particles in magnetic field and high frequency alternating electric field are simulated, and the visual animation simulation of particles movement is achieved. The research demonstrates the feasibility of virtual simulation technology on vacuum coater design.
Highlights
Magnetron sputtering coater is widely used in industrial plating for its high-speed, low temperature and other characteristics
The design of domestic magnetron sputtering coater usually adopts traditional design mode, and designers mainly depends on their old experiences in the design, so it is quite difficult to achieve designed effect by the traditional designing method
The virtual prototyping technology is applied to the design of the magnetron sputtering coater in order to solve the problems in the traditional designing, such as long designing time, high designing cost and low film quality
Summary
Magnetron sputtering coater is widely used in industrial plating for its high-speed, low temperature and other characteristics. The design of domestic magnetron sputtering coater usually adopts traditional design mode, and designers mainly depends on their old experiences in the design, so it is quite difficult to achieve designed effect by the traditional designing method. The virtual prototyping technology is applied to the design of the magnetron sputtering coater in order to solve the problems in the traditional designing, such as long designing time, high designing cost and low film quality. The paper takes the design process of cathode target on magnetron sputtering coater for example to perform early research and demonstrates the feasibility of vacuum coater virtual design
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