Vibratory Gyro-Sensor Using Vertically Set Quartz Crystal Trident-Type Tuning Fork Resonator

Abstract

In this study we deal with a new type of vibratory gyro-sensor using a vertically set quartz crystal trident-type tuning fork resonator. The sensor is made of X-cut quartz crystal wafer formed by rotating 2° about the X-axis, applying the wire saw cutting method. The slits that form three arms are cut along the Y-axis direction. In such a trident-type tuning fork resonator, two resonance vibration modes are used: one has vibrational displacement in the vertical direction (X-axis) of the tuning fork plane and the other has that in the horizontal direction (Z′-axis). When an angular rate (ΩY′ ) around the Y′-axis is applied to the trident-type tuning fork gyro-sensor vibrating in the V-MODE, Coriolis forces, due to the ΩY′ , are applied on the three arms in the X′-axis direction and the H-MODE vibration is induced. Therefore, the angular rate (ΩY′ ) can be determined by detecting the signals of H-MODE vibration. The experimental results have proved that the vibratory gyro-sensor that uses such a quartz crystal tuning fork resonator has good characteristics.