Abstract
Circular vibrator sensors for atomospheric pressure, temperature, and humidity measurements by means of the natural frequency change have been developed. Uniform pressure over a circular plate supported at the edge causes an axisymmetric deformation to a quasi-shallow spherical cap, which changes the natural frequency of the plate. A similar deformation effect is achieved with temperature or humidity by employing bimaterial construction for the plate. Change of the natural frequency is linear with the atmospheric pressure, temperature, or humidity over a relatively wide range, and the sensitivity is sufficiently high for practical applications. The devices are suitable for telemetering and digital measurement applications.
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