Vibrational spectra of a plasma-polymerized coating on the surface of a silicon single crystal

Abstract

The composition and structure of plasma-polymerized coatings on the surface of a silicon single crystal are studied using methods of mass spectrometry and vibrational spectroscopy. It is established that the coating on the side of the surface is a set of ordered and unordered regions of branched chains of halogenocarbons and halogenohydrocarbons. A significant thickness of the coating-substrate transition layer contains silicon carbide and nitrogen dissolved in carbon. A great bulk of the coating is made up of amorphous carbon. The coating mass contains adsorbed gases that block reactive centers. Consideration is given to the special features of recording of vibrational spectra, the coating structure, its differences over the depth, the structural difference between the coating and a polymer film, and aging of the polymer material.