Abstract
High-resolution electron-energy-loss spectroscopy (HREELS) showed that the dominant feature in the HREELS spectrum of the ‘as-received’ ITO was the loss peaks associated with the CH x group. Oxygen-plasma treatment of ITO led to the disappearance of the CH x loss peaks, and a concomitant increase in the intensity of the phonon peaks at 71 and 134 meV. The result indicates the removal of the CH x group and additional oxidation of the ITO surface by the oxygen-plasma treatment. Both processes are proposed to be responsible for the increase in work function of ITO by the oxygen-plasma treatment.
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