Vibration suppression of atomic-force microscopy cantilevers covered by a piezoelectric layer with tensile force

Abstract

In this paper, vibration suppression of a micro-beam covered by a piezoelectric layer is studied. The micro-beam is modeled with the specific attention to its application in AFM. The AFM micro-beam is a cantilever one which is stimulated close to its natural frequency by applying a harmonic voltage to the piezoelectric layer. The beam is an Euler-Bernoulli beam which abbeys Kelvin-Voigt model. Using such model supplies the comparison between elastic and viscoelastic beams; and one of the most important properties of viscoelastic materials, damping effect can readily be investigated. The pump provides an axial load with the result that it suppresses the vibrations. First, the vibration equations are extracted using Lagrangian and extended Hamiltonian method in vertical, longitudinal, as well as torsional directions and are discretized by exploiting the Galerkin mode summation approach. The discretized time-domain equations are solved by the aid of the Runge-Kutta method. The viscoelastic beam is compared with the elastic one, and the effects of damping ratio on vibration responses are presented. Additionally, the effects of micro-pump load, excitation voltage, and initial twist angle are investigated on the amplitude of vibration and natural frequency of system. It is observed that viscoelasticity of beam and axial load of the pump reduce vibrations and provide uniform time-domain responses without beatings.