Vibration of microscale beam induced by laser pulse

Abstract

In the case of ultra-short-pulsed laser heating, two effects become domineering. One is the non-Fourier effect in heat conduction, and the other is the coupling effect between temperature and strain rate. In the present study, a generalized solution for the coupled thermoelastic vibration of a microscale beam resonator induced by pulsed laser heating is developed. The solution takes into account the above two effects. The combined finite sinusoidal Fourier and Laplace transformation method is used to determine the lateral vibration of the beam. The effects of laser pulse energy absorption depth and reference temperature have been studied.